Journals similar to Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
20 similar journals ranked by semantic similarity (SPECTER2 embeddings)
| # | Journal | Publisher | Field | Similarity | JLCS | OA | APC |
|---|---|---|---|---|---|---|---|
| 1 | Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena | American Vacuum Society | Electrical and Electronic Engineering | 99.9% | 55 | No | - |
| 2 | Microelectronic Engineering | Elsevier | Electrical and Electronic Engineering | 99.6% | 75 | No | 2750 USD |
| 3 | Journal of Vacuum Science & Technology A Vacuum Surfaces and Films | American Vacuum Society | Electrical and Electronic Engineering | 99.5% | 75 | No | - |
| 4 | Japanese Journal of Applied Physics | Japan Society of Applied Physics | Electrical and Electronic Engineering | 99.5% | 55 | No | - |
| 5 | Materials Science in Semiconductor Processing | Elsevier | Electrical and Electronic Engineering | 99.4% | 55 | No | 3030 USD |
| 6 | Applied Physics Express | IOP Publishing | Electrical and Electronic Engineering | 99.4% | 80 | Yes (diamond) | 1800 GBP |
| 7 | Applied Physics Letters | American Institute of Physics | Electrical and Electronic Engineering | 99.4% | 75 | No | - |
| 8 | Physica Status Solidi (a) | Wiley | Materials Chemistry | 99.3% | 75 | No | 4020 USD |
| 9 | ECS Journal of Solid State Science and Technology | The Electrochemical Society | Electrical and Electronic Engineering | 99.3% | 75 | No | - |
| 10 | ECS Solid State Letters | The Electrochemical Society | Electrical and Electronic Engineering | 99.3% | 55 | No | - |
| 11 | Semiconductor Science and Technology | IOP Publishing | Electrical and Electronic Engineering | 99.3% | 75 | No | - |
| 12 | Proceedings - Conference on Optoelectronic and Microelectronic Materials and Devices/Proceedings | Institute of Electrical and Electronics Engineers | Electrical and Electronic Engineering | 99.2% | 35 | No | - |
| 13 | Thin Solid Films | Elsevier | Electrical and Electronic Engineering | 99.2% | 75 | No | 2890 USD |
| 14 | Micro and Nano Engineering | Elsevier | Biomedical Engineering | 99.2% | 80 | Yes (gold) | 1380 USD |
| 15 | Journal of Physics D Applied Physics | IOP Publishing | Electrical and Electronic Engineering | 99.2% | 75 | No | - |
| 16 | Journal of Applied Physics | American Institute of Physics | Electrical and Electronic Engineering | 99.1% | 75 | No | 3500 USD |
| 17 | 真空科技 | - | Electrical and Electronic Engineering | 99.1% | 15 | No | - |
| 18 | IEEE Transactions on Nanotechnology | Institute of Electrical and Electronics Engineers | Electrical and Electronic Engineering | 99.1% | 75 | No | - |
| 19 | Journal of the Vacuum Society of Japan | Vacuum Society of Japan | Electrical and Electronic Engineering | 99.0% | 55 | Yes (hybrid) | Free |
| 20 | Journal of Micro/Nanolithography MEMS and MOEMS | SPIE - International Society for Optical Engineering | Electrical and Electronic Engineering | 99.0% | 75 | No | - |
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